Optical MEMS for Chemical Analysis and Biomedicine
by Hongrui Jiang
English | 2016 | ISBN: 1849198977 | 465 Pages | True PDF | 16.8 MB
Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others.